SU-8 plating mold for high-aspect-ratio nickel zone plates
نویسندگان
چکیده
Nickel zone plates are fabricated by electrodeposition into a mold with high aspect ratio and narrow line width. This process requires high-mechanical stability of the mold to avoid pattern collapse in the plating bath. In the present paper we demonstrate how SU-8 can be used as plating mold material in a tri-layer resist to fabricate 35-nm half-pitch nickel gratings with an aspect ratio exceeding 11:1. To attain sufficient stability of the mold the SU-8 was cured by e-beam exposure with a dose of 25 mC/cm at 5-keV electron energy. 2007 Elsevier B.V. All rights reserved.
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